JPH0548053Y2 - - Google Patents

Info

Publication number
JPH0548053Y2
JPH0548053Y2 JP9878788U JP9878788U JPH0548053Y2 JP H0548053 Y2 JPH0548053 Y2 JP H0548053Y2 JP 9878788 U JP9878788 U JP 9878788U JP 9878788 U JP9878788 U JP 9878788U JP H0548053 Y2 JPH0548053 Y2 JP H0548053Y2
Authority
JP
Japan
Prior art keywords
temperature
heat plate
heat
wall
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9878788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220082U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9878788U priority Critical patent/JPH0548053Y2/ja
Publication of JPH0220082U publication Critical patent/JPH0220082U/ja
Application granted granted Critical
Publication of JPH0548053Y2 publication Critical patent/JPH0548053Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP9878788U 1988-07-26 1988-07-26 Expired - Lifetime JPH0548053Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9878788U JPH0548053Y2 (en]) 1988-07-26 1988-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9878788U JPH0548053Y2 (en]) 1988-07-26 1988-07-26

Publications (2)

Publication Number Publication Date
JPH0220082U JPH0220082U (en]) 1990-02-09
JPH0548053Y2 true JPH0548053Y2 (en]) 1993-12-20

Family

ID=31325360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9878788U Expired - Lifetime JPH0548053Y2 (en]) 1988-07-26 1988-07-26

Country Status (1)

Country Link
JP (1) JPH0548053Y2 (en])

Also Published As

Publication number Publication date
JPH0220082U (en]) 1990-02-09

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